NBS Special Publication, Issues 400-421U.S. Government Printing Office, 1918 |
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Page v
... TECHNIQUES Bruce E. Deal , Integrated Circuits R & D Fairchild Camera and Instrument Corporation , Palo Alto , CA 94304 ION AND NEUTRAL BEAMS - TECHNIQUES AND APPLICATIONS LOW ENERGY ION SCATTERING SPECTROMETRY STUDIES OF Si , Si02 AND ...
... TECHNIQUES Bruce E. Deal , Integrated Circuits R & D Fairchild Camera and Instrument Corporation , Palo Alto , CA 94304 ION AND NEUTRAL BEAMS - TECHNIQUES AND APPLICATIONS LOW ENERGY ION SCATTERING SPECTROMETRY STUDIES OF Si , Si02 AND ...
Page vi
TABLE OF CONTENTS PAGE ELECTRON AND PHOTON BEAMS TECHNIQUES AND APPLICATIONS APPLICATIONS OF SCANNING AUGER ... TECHNIQUE FOR THE STUDY OF ELECTRONIC TRAPS IN INSULATORS T. H. DiStefano , IBM Watson Research Center , Yorktown ...
TABLE OF CONTENTS PAGE ELECTRON AND PHOTON BEAMS TECHNIQUES AND APPLICATIONS APPLICATIONS OF SCANNING AUGER ... TECHNIQUE FOR THE STUDY OF ELECTRONIC TRAPS IN INSULATORS T. H. DiStefano , IBM Watson Research Center , Yorktown ...
Page 3
... technique known as Nuclear Resonance Profiling ( NRP ) is of aid . The chief disadvantage of all these accelerator techniques is the cost and size of the equipment . However the increasing usage of ion accelerators for impurity im ...
... technique known as Nuclear Resonance Profiling ( NRP ) is of aid . The chief disadvantage of all these accelerator techniques is the cost and size of the equipment . However the increasing usage of ion accelerators for impurity im ...
Page 4
... technique is its ability to use neutral beams to analyze insulating films under field - free conditions . Auger Electron Spectroscopy , AES , is the most popular of the surface analysis methods . In conjunction with simultaneous sputter ...
... technique is its ability to use neutral beams to analyze insulating films under field - free conditions . Auger Electron Spectroscopy , AES , is the most popular of the surface analysis methods . In conjunction with simultaneous sputter ...
Page 5
actually is , depending upon the technique , the sampling depth , and the particular im- purity distribution . When a surface analyt- ical technique is applied , together with some form of surface removal , for the pur- pose of ...
actually is , depending upon the technique , the sampling depth , and the particular im- purity distribution . When a surface analyt- ical technique is applied , together with some form of surface removal , for the pur- pose of ...
Common terms and phrases
aluminum Analysis for Silicon analyzed angstroms ARPA/NBS Workshop atoms Auger electron Auger electron spectroscopy Auger transition backscattering backside base binding energy bombardment boron Bureau of Standards chemical chemical shift collector resistivity concentration curve depth profile detector diffused dopant density effect electron beam emitter ESCA escape depth etched field plate film function gold impurity integrated circuit interface ion beam laser layer measurement metal MOS capacitor n-p-n transistor National Bureau obtained optical oxygen p-n junctions particles peak photoelectron Phys primary beam primary ion probe protons region resistor VDP resonance sample scanner scanning scattering semiconductor sensitivity sheet resistor shown in Figure signal Silicon Devices silicon nitride silicon oxides silicon surface SIMS SiO2 sodium specimen spectra spectrometer spectroscopy spectrum sputtering stoichiometry substrate Surface Analysis surface photovoltage technique Technology test structures thermal thickness tion transistor voltage wafer width X-ray yield yield curve
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Page 48 - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the material or equipment identified is necessarily the best available for the purpose.
Page 64 - Papers of interest primarily to scientists working in these fields. This section covers a broad range of physical and chemical research, with major emphasis on standards of physical measurement, fundamental constants, and properties of matter. Issued six times a year. Annual subscription: Domestic, $9.50; foreign, $11.75*.
Page 64 - NONPERIODICALS Monographs — Major contributions to the technical literature on various subjects related to the Bureau's scientific and technical activities. Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications — Include proceedings of conferences sponsored by NBS, NBS annual reports, and other special publications appropriate to...
Page 38 - National Standard Reference Data Series — Provides quantitative data on the physical and chemical properties of materials, compiled from the world's literature and critically evaluated.
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Page 41 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end, the Bureau conducts research and provides...
Page 35 - Standards, the Institute for Materials Research, the Institute for Applied Technology, the Institute for Computer Sciences and Technology, and the Office for Information Programs. THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's...
Page 32 - Building Science Series — Disseminates technical information developed at the Bureau on building materials, components, systems, and whole structures. The series presents research results, test methods, and performance criteria related to the structural and environmental functions and the durability and safety characteristics of building elements and systems.