NBS Special Publication, Issues 400-421U.S. Government Printing Office, 1918 |
From inside the book
Results 1-5 of 86
Page 5
... Shifts in the Thermally Stimulated Current and Capacitance Response with Heating Rate , Solid - State Electronics 15 , 69-79 ( 1972 ) . 14. Buehler , M. G. and Phillips , W. E. , A Study of the Gold Acceptor in a Silicon pn Junction and ...
... Shifts in the Thermally Stimulated Current and Capacitance Response with Heating Rate , Solid - State Electronics 15 , 69-79 ( 1972 ) . 14. Buehler , M. G. and Phillips , W. E. , A Study of the Gold Acceptor in a Silicon pn Junction and ...
Page 72
... shift even your secondary - ion energy distribution . Participant : The temperature of 180 ° C that you quote is , I gather , a bulk sample temperature . Phillips : That is correct . The microtem- perature at the sputtering spot has not ...
... shift even your secondary - ion energy distribution . Participant : The temperature of 180 ° C that you quote is , I gather , a bulk sample temperature . Phillips : That is correct . The microtem- perature at the sputtering spot has not ...
Page 106
... shifts , changes in peak shape , and in fine structure on the low energy side of the peak . Figure 3 shows Auger spectra ... shift of 12 eV . In the case of pure silicon the low energy peak occurs at 92 eV . Although such changes in the ...
... shifts , changes in peak shape , and in fine structure on the low energy side of the peak . Figure 3 shows Auger spectra ... shift of 12 eV . In the case of pure silicon the low energy peak occurs at 92 eV . Although such changes in the ...
Page 108
... shifts , additional plasma loss peaks ) which can be used to verify that oxidation has actually occurred , but Schon ( 21 ) has recently used X - ray induced Auger emission and photoelectron spectroscopy to identify the presence of Cu ...
... shifts , additional plasma loss peaks ) which can be used to verify that oxidation has actually occurred , but Schon ( 21 ) has recently used X - ray induced Auger emission and photoelectron spectroscopy to identify the presence of Cu ...
Page 119
... shifts are well known from XPS and ESCA analysis of oxidized silicon and evaporated films of silicon oxide , and appear as a 3-4 eV shift in the binding energy of the Si ( 2p ) energy level . We see similar chemical shifts in the ...
... shifts are well known from XPS and ESCA analysis of oxidized silicon and evaporated films of silicon oxide , and appear as a 3-4 eV shift in the binding energy of the Si ( 2p ) energy level . We see similar chemical shifts in the ...
Common terms and phrases
aluminum Analysis for Silicon analyzed angstroms ARPA/NBS Workshop atoms Auger electron Auger electron spectroscopy Auger transition backscattering backside base binding energy bombardment boron Bureau of Standards chemical chemical shift collector resistivity concentration curve depth profile detector diffused dopant density effect electron beam emitter ESCA escape depth etched field plate film function gold impurity integrated circuit interface ion beam laser layer measurement metal MOS capacitor n-p-n transistor National Bureau obtained optical oxygen p-n junctions particles peak photoelectron Phys primary beam primary ion probe protons region resistor VDP resonance sample scanner scanning scattering semiconductor sensitivity sheet resistor shown in Figure signal Silicon Devices silicon nitride silicon oxides silicon surface SIMS SiO2 sodium specimen spectra spectrometer spectroscopy spectrum sputtering stoichiometry substrate Surface Analysis surface photovoltage technique Technology test structures thermal thickness tion transistor voltage wafer width X-ray yield yield curve
Popular passages
Page 48 - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the material or equipment identified is necessarily the best available for the purpose.
Page 64 - Papers of interest primarily to scientists working in these fields. This section covers a broad range of physical and chemical research, with major emphasis on standards of physical measurement, fundamental constants, and properties of matter. Issued six times a year. Annual subscription: Domestic, $9.50; foreign, $11.75*.
Page 64 - NONPERIODICALS Monographs — Major contributions to the technical literature on various subjects related to the Bureau's scientific and technical activities. Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications — Include proceedings of conferences sponsored by NBS, NBS annual reports, and other special publications appropriate to...
Page 38 - National Standard Reference Data Series — Provides quantitative data on the physical and chemical properties of materials, compiled from the world's literature and critically evaluated.
Page 35 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials: and provides calibration services.
Page 64 - This monthly magazine is published to inform scientists, engineers, businessmen, industry, teachers, students, and consumers of the latest advances in science and technology, with primary emphasis on the work at NBS. The magazine highlights and reviews such issues as energy research, fire protection, building technology. metric conversion. pollution abatement, health and safety, and consumer product performance. In addition, it reports the results of Bureau programs in measurement standards and techniques,...
Page 41 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end, the Bureau conducts research and provides...
Page 35 - Standards, the Institute for Materials Research, the Institute for Applied Technology, the Institute for Computer Sciences and Technology, and the Office for Information Programs. THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's...
Page 32 - Building Science Series — Disseminates technical information developed at the Bureau on building materials, components, systems, and whole structures. The series presents research results, test methods, and performance criteria related to the structural and environmental functions and the durability and safety characteristics of building elements and systems.