NBS Special Publication, Issues 400-421U.S. Government Printing Office, 1918 |
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Page 2
... particle , or photon beams . Our initial work in this area has disclosed both great promise , and numerous problems in interpretation and quantification of the results of beam analysis methods . It has also disclosed that too little ...
... particle , or photon beams . Our initial work in this area has disclosed both great promise , and numerous problems in interpretation and quantification of the results of beam analysis methods . It has also disclosed that too little ...
Page 3
... particles is detected which may , or may not , be the same as the primary particles . The difficulty in detecting neutrals has been reason to exclude this species as a viable secondary particle spectroscopy . The ion and neutral ...
... particles is detected which may , or may not , be the same as the primary particles . The difficulty in detecting neutrals has been reason to exclude this species as a viable secondary particle spectroscopy . The ion and neutral ...
Page 6
... particles need not be identical . A description of the techniques appears in the text . NUMBER OF COUNTS , N AN TACH NMIN Figure 2 . Definitions of sensitivity , detect- ion limit , minimum detectable impurity level and background are ...
... particles need not be identical . A description of the techniques appears in the text . NUMBER OF COUNTS , N AN TACH NMIN Figure 2 . Definitions of sensitivity , detect- ion limit , minimum detectable impurity level and background are ...
Page 8
... particles . In addition , the surface should have the proper crystal ori- entation and be relatively free of stress . Finally , subsequent substrate processing steps such as buried collector preparation and epitaxial film deposition ...
... particles . In addition , the surface should have the proper crystal ori- entation and be relatively free of stress . Finally , subsequent substrate processing steps such as buried collector preparation and epitaxial film deposition ...
Page 21
... particle does not have to remain ionized to be energy analyzed at these ener- gies ) is due not only to the mass of ... particles which escape the solid as ions . The sputtered ions are then extracted into a mass spectrometer and anal ...
... particle does not have to remain ionized to be energy analyzed at these ener- gies ) is due not only to the mass of ... particles which escape the solid as ions . The sputtered ions are then extracted into a mass spectrometer and anal ...
Common terms and phrases
aluminum Analysis for Silicon analyzed angstroms ARPA/NBS Workshop atoms Auger electron Auger electron spectroscopy Auger transition backscattering backside base binding energy bombardment boron Bureau of Standards chemical chemical shift collector resistivity concentration curve depth profile detector diffused dopant density effect electron beam emitter ESCA escape depth etched field plate film function gold impurity integrated circuit interface ion beam laser layer measurement metal MOS capacitor n-p-n transistor National Bureau obtained optical oxygen p-n junctions particles peak photoelectron Phys primary beam primary ion probe protons region resistor VDP resonance sample scanner scanning scattering semiconductor sensitivity sheet resistor shown in Figure signal Silicon Devices silicon nitride silicon oxides silicon surface SIMS SiO2 sodium specimen spectra spectrometer spectroscopy spectrum sputtering stoichiometry substrate Surface Analysis surface photovoltage technique Technology test structures thermal thickness tion transistor voltage wafer width X-ray yield yield curve
Popular passages
Page 48 - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the material or equipment identified is necessarily the best available for the purpose.
Page 64 - Papers of interest primarily to scientists working in these fields. This section covers a broad range of physical and chemical research, with major emphasis on standards of physical measurement, fundamental constants, and properties of matter. Issued six times a year. Annual subscription: Domestic, $9.50; foreign, $11.75*.
Page 64 - NONPERIODICALS Monographs — Major contributions to the technical literature on various subjects related to the Bureau's scientific and technical activities. Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications — Include proceedings of conferences sponsored by NBS, NBS annual reports, and other special publications appropriate to...
Page 38 - National Standard Reference Data Series — Provides quantitative data on the physical and chemical properties of materials, compiled from the world's literature and critically evaluated.
Page 35 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials: and provides calibration services.
Page 64 - This monthly magazine is published to inform scientists, engineers, businessmen, industry, teachers, students, and consumers of the latest advances in science and technology, with primary emphasis on the work at NBS. The magazine highlights and reviews such issues as energy research, fire protection, building technology. metric conversion. pollution abatement, health and safety, and consumer product performance. In addition, it reports the results of Bureau programs in measurement standards and techniques,...
Page 41 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end, the Bureau conducts research and provides...
Page 35 - Standards, the Institute for Materials Research, the Institute for Applied Technology, the Institute for Computer Sciences and Technology, and the Office for Information Programs. THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's...
Page 32 - Building Science Series — Disseminates technical information developed at the Bureau on building materials, components, systems, and whole structures. The series presents research results, test methods, and performance criteria related to the structural and environmental functions and the durability and safety characteristics of building elements and systems.