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NATIONAL BUREAU OF STANDARDS

The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end, the Bureau conducts research and provides: (1) a basis for the Nation's physical measurement system, (2) scientific and technological services for industry and government, (3) a technical basis for equity in trade, and (4) technical services to promote public safety. The Bureau consists of the Institute for Basic Standards, the Institute for Materials Research, the Institute for Applied Technology, the Institute for Computer Sciences and Technology, and the Office for Information Programs. THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce. The Institute consists of a Center for Radiation Research, an Office of Measurement Services and the following divisions:

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Optical Physics - Nuclear
Electromagnetics 3 Time

Applied Mathematics - Electricity Mechanics Heat Sciences Applied Radiation - Quantum Electronics* and Frequency - Laboratory Astrophysics - Cryogenics'. THE INSTITUTE FOR MATERIALS RESEARCH conducts materials research leading to improved methods of measurement, standards, and data on the properties of well-characterized materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government agencies; and develops, produces, and distributes standard reference materials. The Institute consists of the Office of Standard Reference Materials and the following divisions:

Analytical Chemistry Polymers
Radiation Physical Chemistry.

Metallurgy

Inorganic Materials

Reactor

THE INSTITUTE FOR APPLIED TECHNOLOGY provides technical services to promote the use of available technology and to facilitate technological innovation in industry and Government; cooperates with public and private organizations leading to the development of technological standards (including mandatory safety standards), codes and methods of test; and provides technical advice and services to Government agencies upon request. The Institute consists of a Center for Building Technology and the following divisions and offices: Engineering and Product Standards Weights and Measures - Invention and Innovation Product Evaluation Technology Electronic Technology Technical Analysis

Measurement Engineering Structures, Materials, and Life Safety' Building Environment - Technical Evaluation and Application Fire Technology.

THE INSTITUTE FOR COMPUTER SCIENCES AND TECHNOLOGY conducts research and provides technical services designed to aid Government agencies in improving cost effectiveness in the conduct of their programs through the selection, acquisition, and effective utilization of automatic data processing equipment; and serves as the principal focus within the executive branch for the development of Federal standards for automatic data processing equipment, techniques, and computer languages. The Institute consists of the following divisions:

Computer Services · Systems and Software tion Technology.

Computer Systems Engineering

Informa

THE OFFICE FOR INFORMATION PROGRAMS promotes optimum dissemination and accessibility of scientific information generated within NBS and other agencies of the Federal Government; promotes the development of the National Standard Reference Data System and a system of information analysis centers dealing with the broader aspects of the National Measurement System; provides appropriate services to ensure that the NBS staff has optimum accessibility to the scientific information of the world. The Office consists of the following organizational units:

Office of Standard Reference Data - Office of Information Activities - Office of Technical Publications Library Office of International Relations.

1 Headquarters and Laboratories at Gaithersburg, Maryland, unless otherwise noted; mailing address Washington, D.C. 20234.

2 Part of the Center for Radiation Research.

Part of the Center for Building Technology.

Semiconductor Measurement Technology:

A BASIC Program for Calculating Dopant Density Profiles
from Capacitance-Voltage Data

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U.S. DEPARTMENT OF COMMERCE, Rogers C. B. Morton, Secretary
NATIONAL BUREAU OF STANDARDS, Richard W. Roberts, Director

Library of Congress Cataloging in Publication Data

Mattis, Richard L.

A BASIC Program for Calculating Dopant Density Profiles from Capacitance - Voltage Data.

(Semiconductor Measurement Technology) (National Bureau of Standards Special Publication; 400-11)

Supt. of Docs. No.: C 13.10:400-11

1. Electronic Data Processing-lon Implantation. 2. Electronic
Data Processing-Diodes, Semiconductor. 3. Electronic Data
Processing-Electric Measurements. 4. BASIC (Computer Pro-
gram Language) I. Buehler, Martin G., joint author. II. United
States. National Bureau of Standards. III. Title. IV. Series. V.
Series: United States. National Bureau of Standards. Special Pub-
lication; 400-11. QC100.U57 No. 400-11 [TK7871.85] 389'.08s
[621.3815'.2'028] 75-619089

National Bureau of Standards Special Publication 400-11
Nat. Bur. Stand. (U.S.), Spec. Publ. 400-11, 39 pages (June 1975)
CODEN: XNBSAV

U.S. GOVERNMENT PRINTING OFFICE
WASHINGTON: 1975

For sale by the Superintendent of Documents, U.S. Government Printing Office, Washington, D.C. 20402 (Order by SD Catalog No. C13.10:400-11). Price $1.00 (Add 25 percent additional for other than U.S. mailing.)

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