NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 44
... Thickness Cleave and Stain Measurements • Metal - Photoresist - Semiconductor Capacitors Wafer Inspection and Test Flying - Spot Scanner Development Automated Scanning Low Energy Electron Probe Interconnection Bording In - Process Bond ...
... Thickness Cleave and Stain Measurements • Metal - Photoresist - Semiconductor Capacitors Wafer Inspection and Test Flying - Spot Scanner Development Automated Scanning Low Energy Electron Probe Interconnection Bording In - Process Bond ...
Page 44
... Thickness by Three Methods · · Bonding Tool Material Properties • • Thermal Resistance of a Type d Darlington Device · Peak Temperature Determination . PAGE 13 • 17 21 26 30 36 39 PREFACE SEMICONDUCTOR MEASUREMENT TECHNOLOGY QUARTERLY ...
... Thickness by Three Methods · · Bonding Tool Material Properties • • Thermal Resistance of a Type d Darlington Device · Peak Temperature Determination . PAGE 13 • 17 21 26 30 36 39 PREFACE SEMICONDUCTOR MEASUREMENT TECHNOLOGY QUARTERLY ...
Page 1
... thickness measurement ; use of the flying - spot scanner , initial work on the scanning low energy electron probe , mathematical modeling of ultrasonic bonding , an improved method for force adjustment and measurement on beam - lead ...
... thickness measurement ; use of the flying - spot scanner , initial work on the scanning low energy electron probe , mathematical modeling of ultrasonic bonding , an improved method for force adjustment and measurement on beam - lead ...
Page 3
... thickness of surface films . Other experiments on low - carbon silicon sug- gested that the previously observed carbon film arises from external sources and not from the surface or bulk of the silicon . A series of measurements was ...
... thickness of surface films . Other experiments on low - carbon silicon sug- gested that the previously observed carbon film arises from external sources and not from the surface or bulk of the silicon . A series of measurements was ...
Page 4
... thickness from the intersection of the two fits . Photolithography - Work in the task which has been initiated to develop procedures fcr primary line width measurement calibrations , to provide calibrated line width measurement ...
... thickness from the intersection of the two fits . Photolithography - Work in the task which has been initiated to develop procedures fcr primary line width measurement calibrations , to provide calibrated line width measurement ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
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Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
Page 19 - Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications...
Page ii - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 42 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials; and provides calibration services.
Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.