NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 39
... structures . The series presents research results , test methods , and perform- ance criteria related to the structural and environmen- tal functions and the durability and safety character- istics of building elements and systems ...
... structures . The series presents research results , test methods , and perform- ance criteria related to the structural and environmen- tal functions and the durability and safety character- istics of building elements and systems ...
Page 44
... Test Structures on Test Pattern NBS - 3 • · Epitaxial Layer Thickness by Three Methods · · Bonding Tool Material Properties • • Thermal Resistance of a Type d Darlington Device · Peak Temperature Determination . PAGE 13 • 17 21 26 30 36 ...
... Test Structures on Test Pattern NBS - 3 • · Epitaxial Layer Thickness by Three Methods · · Bonding Tool Material Properties • • Thermal Resistance of a Type d Darlington Device · Peak Temperature Determination . PAGE 13 • 17 21 26 30 36 ...
Page 3
... test ucture to obtain data for use in the re- luation of Irvin's curves ... structures . Of particular interest are determinations of impurity profiles ... Test Patterns Test patterns were the sub- ject of the third ARPA / NBS Workshop ...
... test ucture to obtain data for use in the re- luation of Irvin's curves ... structures . Of particular interest are determinations of impurity profiles ... Test Patterns Test patterns were the sub- ject of the third ARPA / NBS Workshop ...
Page 4
... test patterns in manufacturing for rapid start up of new processes and control of on- going processes and , in the ... structures . The CCD test pattern being developed by the Naval Electronics Laboratory Center with ARPA funding has ...
... test patterns in manufacturing for rapid start up of new processes and control of on- going processes and , in the ... structures . The CCD test pattern being developed by the Naval Electronics Laboratory Center with ARPA funding has ...
Page v
... Test Structures on Test Pattern NBS - 3 · Epitaxial Layer Thickness by Three Methods • • Bonding Tool Material Properties . Thermal Resistance of a Type d Darlington Device Peak Temperature Determination · PAGE 29 30 31 32 35 3333333 35 ...
... Test Structures on Test Pattern NBS - 3 · Epitaxial Layer Thickness by Three Methods • • Bonding Tool Material Properties . Thermal Resistance of a Type d Darlington Device Peak Temperature Determination · PAGE 29 30 31 32 35 3333333 35 ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
Popular passages
Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
Page 19 - Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications...
Page ii - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 42 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials; and provides calibration services.
Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.