NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 44
... Test Patterns Test Pattern for Resistivity - Dopant Density Evaluation Charge - Coupled Device Test Pattern Epitaxial Layer Thickness Cleave and Stain Measurements • Metal - Photoresist - Semiconductor Capacitors Wafer Inspection and Test ...
... Test Patterns Test Pattern for Resistivity - Dopant Density Evaluation Charge - Coupled Device Test Pattern Epitaxial Layer Thickness Cleave and Stain Measurements • Metal - Photoresist - Semiconductor Capacitors Wafer Inspection and Test ...
Page 1
... testing individual beam - lead bonds . Results are also reported on a holder for ... test pattern for resistivity - dopant density evaluation , epitaxial layer ... patterns ; thermal resistance ; thermal response ; thermally stimulated ...
... testing individual beam - lead bonds . Results are also reported on a holder for ... test pattern for resistivity - dopant density evaluation , epitaxial layer ... patterns ; thermal resistance ; thermal response ; thermally stimulated ...
Page 3
... - dressed various aspects of test pattern anal- ysis and use . The Workshop was particularly significant in disclosing the value of test patterns in manufacturing 3 Resistivity; Dopant Profiles Incremental Sheet Resistance.
... - dressed various aspects of test pattern anal- ysis and use . The Workshop was particularly significant in disclosing the value of test patterns in manufacturing 3 Resistivity; Dopant Profiles Incremental Sheet Resistance.
Page 4
... test patterns will require both increased understanding of the interpretation of the measurement results and improved data acqui- sition , analysis , and display systems . There An initial fabrication run of the new test Preliminary pattern ...
... test patterns will require both increased understanding of the interpretation of the measurement results and improved data acqui- sition , analysis , and display systems . There An initial fabrication run of the new test Preliminary pattern ...
Page vii
... testing individual beam - lead bonds . Results are also reported on a holder for ... test pattern for resistivity - dopant density evaluation , epitaxial layer ... patterns ; thermal resistance ; thermal response ; thermally stimulated ...
... testing individual beam - lead bonds . Results are also reported on a holder for ... test pattern for resistivity - dopant density evaluation , epitaxial layer ... patterns ; thermal resistance ; thermal response ; thermally stimulated ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
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Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
Page 19 - Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications...
Page ii - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 42 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials; and provides calibration services.
Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.