NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page vi
... devices and inte- grated circuits through improvements in mea- surement technology for use in specifying materials and devices in national and inter- national commerce and for use by industry in controlling device fabrication processes ...
... devices and inte- grated circuits through improvements in mea- surement technology for use in specifying materials and devices in national and inter- national commerce and for use by industry in controlling device fabrication processes ...
Page 1
... devices that are being studied at the National Bureau of Standards . The Program , which emphasizes silicon - based device technologies , is a con- tinuing one , and the results and conclusions reported here are subject to modification ...
... devices that are being studied at the National Bureau of Standards . The Program , which emphasizes silicon - based device technologies , is a con- tinuing one , and the results and conclusions reported here are subject to modification ...
Page 5
... device industry in the areas of lication of laser scanning for wafer sting and other purposes , application of SEM ... device are not available at the exterior terminals so that it is not possible to measure all desired junction voltages ...
... device industry in the areas of lication of laser scanning for wafer sting and other purposes , application of SEM ... device are not available at the exterior terminals so that it is not possible to measure all desired junction voltages ...
Page 19
... device , the scribe grid was omitted from the Base and Emitter masks and included on only the Contact mask . Special care must be taken when scribing to assure proper chip separation . The devices specifically designed for the ...
... device , the scribe grid was omitted from the Base and Emitter masks and included on only the Contact mask . Special care must be taken when scribing to assure proper chip separation . The devices specifically designed for the ...
Page 22
... Device Test Pattern This study was undertaken to investigate the applicability of the charge - coupled device ( CCD ) as a test structure for use in semi- conductor process control . Prior to using the CCD as a process control tool ...
... Device Test Pattern This study was undertaken to investigate the applicability of the charge - coupled device ( CCD ) as a test structure for use in semi- conductor process control . Prior to using the CCD as a process control tool ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
Popular passages
Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
Page 19 - Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications...
Page ii - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 42 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials; and provides calibration services.
Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.