NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 2
... determined , an apparent profile N ( W ) vs. W is calcu- lated using eqs ( 1 ) and ( 2 ) . 2.2 . The Back Depletion Correction The back depletion correction [ 10 ] is based on eqs ( 5 ) through ( 10 ) below : N ( A ) No exp [ - ( 2-4 ) ...
... determined , an apparent profile N ( W ) vs. W is calcu- lated using eqs ( 1 ) and ( 2 ) . 2.2 . The Back Depletion Correction The back depletion correction [ 10 ] is based on eqs ( 5 ) through ( 10 ) below : N ( A ) No exp [ - ( 2-4 ) ...
Page 3
... determined profile . + B • [ - ( 2 ) 2 ] N ( B ) = - No No exp L ( 12 ) Experimental profiles sometimes show a decrease in N ( B ) for small B. A plot of the true Gaussian profile can be helpful in determining whether such an ...
... determined profile . + B • [ - ( 2 ) 2 ] N ( B ) = - No No exp L ( 12 ) Experimental profiles sometimes show a decrease in N ( B ) for small B. A plot of the true Gaussian profile can be helpful in determining whether such an ...
Page 5
... determined . The given variable x is first transformed using z = -100 In ( x ) In ( 10-7 ) + 100 ( 17 ) No • to yield a value of z from 0 to 100 corresponding to a value of x from 10-7 to 1. The trans- formation is illustrated in figure ...
... determined . The given variable x is first transformed using z = -100 In ( x ) In ( 10-7 ) + 100 ( 17 ) No • to yield a value of z from 0 to 100 corresponding to a value of x from 10-7 to 1. The trans- formation is illustrated in figure ...
Page 16
... determined by the coefficients of X5 in line 150 which can be altered as needed . Given the set of A values , the corresponding B ( repre- sented as Bl ) values are calculated from eq ( 7 ) , modified by letting WB A so that B is given ...
... determined by the coefficients of X5 in line 150 which can be altered as needed . Given the set of A values , the corresponding B ( repre- sented as Bl ) values are calculated from eq ( 7 ) , modified by letting WB A so that B is given ...
Page 3
... determine the › erature variation of the energy of the eptor level with respect to the band es ; this in turn ... determining the thickness of surface films . Other experiments on low - carbon silicon sug- gested that the previously ...
... determine the › erature variation of the energy of the eptor level with respect to the band es ; this in turn ... determining the thickness of surface films . Other experiments on low - carbon silicon sug- gested that the previously ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
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Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
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