NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 44
... calibration current density • 31 32 3333333 35 · 35 38 338 ... 39 LIST OF TABLES Properties of Gold - Doped Silicon Specimens . . Specimens for the Comparative Study of Surface Analysis Techniques Planar Test Structures on Test Pattern ...
... calibration current density • 31 32 3333333 35 · 35 38 338 ... 39 LIST OF TABLES Properties of Gold - Doped Silicon Specimens . . Specimens for the Comparative Study of Surface Analysis Techniques Planar Test Structures on Test Pattern ...
Page 4
... calibrations , to provide calibrated line width measurement artifacts for use with optical microscopes , and to develop improved theory and experi- mental verification for accurate measure- ments with optical systems is currently be ing ...
... calibrations , to provide calibrated line width measurement artifacts for use with optical microscopes , and to develop improved theory and experi- mental verification for accurate measure- ments with optical systems is currently be ing ...
Page v
... calibration current density . LIST OF TABLES Properties of Gold - Doped Silicon Specimens • • Specimens for the Comparative Study of Surface Analysis Techniques Planar Test Structures on Test Pattern NBS - 3 · Epitaxial Layer Thickness ...
... calibration current density . LIST OF TABLES Properties of Gold - Doped Silicon Specimens • • Specimens for the Comparative Study of Surface Analysis Techniques Planar Test Structures on Test Pattern NBS - 3 · Epitaxial Layer Thickness ...
Page 30
... calibrated it was found that differences in substrate heights change the force cali- bration so that an individual calibration must be performed for each substrate height . Fourth , any change in the tension of the spring in the force ...
... calibrated it was found that differences in substrate heights change the force cali- bration so that an individual calibration must be performed for each substrate height . Fourth , any change in the tension of the spring in the force ...
Page 37
... calibration coefficient for is method can be divided equally between e two devices . If this is done , one finds at It should be emphasized that the measure- ments discussed above are measurements on a specific transistor type under a ...
... calibration coefficient for is method can be divided equally between e two devices . If this is done , one finds at It should be emphasized that the measure- ments discussed above are measurements on a specific transistor type under a ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
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Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
Page 19 - Handbooks — Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications...
Page ii - In no case does such identification imply recommendation or endorsement by the National Bureau of Standards, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
Page 42 - ... materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government Agencies; develops, produces, and distributes Standard Reference Materials; and provides calibration services.
Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.