NBS Special Publication, Issues 400-411U.S. Government Printing Office, 1975 |
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Page 2
... calculate the dopant density profile from the experimental C - V data are given . These equations relate to the peripheral correc- tion , the back depletion correction and the calculation of the complementary error function and its ...
... calculate the dopant density profile from the experimental C - V data are given . These equations relate to the peripheral correc- tion , the back depletion correction and the calculation of the complementary error function and its ...
Page 1
... calculating dopant density vs. depth profiles from capacitance - voltage data for the case of a Gaussian - diffused p ... calculated dopant density profile [ 6 ] . A computer program , henceforth denoted CV1 for convenience and listed in ...
... calculating dopant density vs. depth profiles from capacitance - voltage data for the case of a Gaussian - diffused p ... calculated dopant density profile [ 6 ] . A computer program , henceforth denoted CV1 for convenience and listed in ...
Page 2
... calculate the dopant density profile from the experimental C - V data are given . These equations relate to the peripheral correc- tion , the back depletion correction and the calculation of the complementary error function and its ...
... calculate the dopant density profile from the experimental C - V data are given . These equations relate to the peripheral correc- tion , the back depletion correction and the calculation of the complementary error function and its ...
Page 3
... calculated from eq ( 8 ) and B is calculated from eq ( 11 ) . The desired profile is a plot or listing of N ( B ) vs. B. Equation ( 12 ) below is used to calculate a true Gaussian profile for comparison with the experimentally ...
... calculated from eq ( 8 ) and B is calculated from eq ( 11 ) . The desired profile is a plot or listing of N ( B ) vs. B. Equation ( 12 ) below is used to calculate a true Gaussian profile for comparison with the experimentally ...
Page 5
... calculate y from a given x , z is first calculated and three data pairs ( zı , yı ) , ( z2 , y2 ) , and ( z3 , yз ) are chosen from the table such that and > Z3 2 22 > 21 = ( 18 ) Уз < < y ≤ y2 У 1 A parabolic fit to these three data ...
... calculate y from a given x , z is first calculated and three data pairs ( zı , yı ) , ( z2 , y2 ) , and ( z3 , yз ) are chosen from the table such that and > Z3 2 22 > 21 = ( 18 ) Уз < < y ≤ y2 У 1 A parabolic fit to these three data ...
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Common terms and phrases
aluminum analysis angle applied beam energy bond pairs bond pull test boron Bureau of Standards calibration capacitance Center collector curve Darlington pairs depletion detector determined diffusion diode dopant density edge electrical electron beam emitter epitaxial eyepiece frequency function germanium heating image intensity profile impurity input integrated circuits intermediate-frequency ionization junction temperature Laboratory leak loop height materials measured pull strength method microscope mixer modulation MOS capacitor n-type National Bureau NBS Spec noise noise figure obtained operating output oxide p-n junction parameters percent PHOTOLITHOGRAPHY photomask plotted power transistors probe Publ ratio region resistance measurements resistor scanning electron scanning electron microscope Semiconductor Measurement Technology sheet resistance shown in figure silicon dioxide specimen spreading resistance substrate surface switching technical technique test patterns test structures thermal resistance thickness tion two-level bond values voltage wafer width wire bonds
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Page 53 - A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va.
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Page 22 - NATIONAL BUREAU OF STANDARDS The National Bureau of Standards' was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end. the Bureau conducts research and provides...
Page 24 - THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce.