NBS Special Publication, Issues 400-431U.S. Government Printing Office, 1977 |
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Page v
... METHODS FOR DEFECT TESTING • • 3.1 Types and Causes of Defects and Their Effects on IC Reliability . Conventional Methods for Defect Testing . Shortcomings of Conventional Methods 7 3.2 3.3 789 3.4 Methods Investigated and Developed ...
... METHODS FOR DEFECT TESTING • • 3.1 Types and Causes of Defects and Their Effects on IC Reliability . Conventional Methods for Defect Testing . Shortcomings of Conventional Methods 7 3.2 3.3 789 3.4 Methods Investigated and Developed ...
Page vi
... Methods 4.5 Techniques for Quantifying Defect Density 4.5.1 Manual Microscopic Analysis 4.5.2 Feasibility Study of Automated Read - out 4.6 Advantages of the Reverse Decoration - Carbon Black Method 4.6.1 Speed 4.6.2 Simplicity 4.6.3 ...
... Methods 4.5 Techniques for Quantifying Defect Density 4.5.1 Manual Microscopic Analysis 4.5.2 Feasibility Study of Automated Read - out 4.6 Advantages of the Reverse Decoration - Carbon Black Method 4.6.1 Speed 4.6.2 Simplicity 4.6.3 ...
Page 1
... methods to evaluate the quality of glass passivation overcoats on semiconductor devices are generally inadequate and / or destructive . Three new methods have been devised that overcome these problems : ( 1 ) Sequen- tial selective ...
... methods to evaluate the quality of glass passivation overcoats on semiconductor devices are generally inadequate and / or destructive . Three new methods have been devised that overcome these problems : ( 1 ) Sequen- tial selective ...
Page 2
... methods available for evaluating the quality of glass passivation over- coats have been inadequate and / or destructive . The objective of this research program has been the development of analytical test methods that do not suffer from ...
... methods available for evaluating the quality of glass passivation over- coats have been inadequate and / or destructive . The objective of this research program has been the development of analytical test methods that do not suffer from ...
Page 3
... methods . In the corona - charging method of decoration , surface ions from a corona discharge are deposited on the insulating surfaces of the sample . At a defect in the insulator , ions flow to the grounded substrate . After the ...
... methods . In the corona - charging method of decoration , surface ions from a corona discharge are deposited on the insulating surfaces of the sample . At a defect in the insulator , ions flow to the grounded substrate . After the ...
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Common terms and phrases
Acrylic aluminum etching aluminum-metallized applications Base Sheet Resistor BEC Model bias voltage Bias-Isolation Unit brightfield Bureau of Standards C-meter capacitance capacitor Capacitor over Collector carbon black circuit cm³ computed corona charging cracks defect detection demarcation etching demarcation-etched deposition dielectric screening length diode dopant density e-e scattering effect electron mobility EMITTER etch time factor etchant film Greek Cross impurity scattering mobility integrated circuits ionized impurity scattering liquid Lubrizol mask for quadrant materials metal microcracks microscope MOS Capacitor n-type silicon National Bureau neutral impurity scattering Number Oxide surface voltage p-n junctions partial pinholes passivation layer phonon phosphor phosphorus-doped silicon photomicrographs Photoresist Program quadrant are listed Resistor Greek Cross reverse decoration S(Cs sample Semiconductor Semiconductor Measurement Technology sensitivity Sheet Resistor Greek shown in figure silicon dioxide silicon nitride suspension technical techniques test pattern NBS-4 theoretical thermal thickness total donor density wafer
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