NBS Special Publication, Issues 400-431U.S. Government Printing Office, 1977 |
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Page 47
... effect is shown in figure 24 , where current vs time is plotted for three cases for lead aluminosilicate glass in C2C13F3 with petroleum barium sulfonate as the charging agent . Deposition on bare silicon results in a decaying current ...
... effect is shown in figure 24 , where current vs time is plotted for three cases for lead aluminosilicate glass in C2C13F3 with petroleum barium sulfonate as the charging agent . Deposition on bare silicon results in a decaying current ...
Page 53
... effect , is plotted vs the area of the oxide covered surface . There is little dependence on oxide thickness . This is shown in figure 29 for three oxide thicknesses of the same square geometry . The observations indicate that the ...
... effect , is plotted vs the area of the oxide covered surface . There is little dependence on oxide thickness . This is shown in figure 29 for three oxide thicknesses of the same square geometry . The observations indicate that the ...
Page 56
... effect increases detectability since it magnifies the defects as far as charged particle deposition is concerned . The margin is of the order of 25 μm in lateral dimension . For the process implementation it is necessary that the ...
... effect increases detectability since it magnifies the defects as far as charged particle deposition is concerned . The margin is of the order of 25 μm in lateral dimension . For the process implementation it is necessary that the ...
Page 58
... effect will be discussed later . A schematic of the deposition process for direct decoration is shown in figure 33 . 4.4.2.1 Particle Suspensions - Several particle suspensions were used successfully in direct decoration tests . These ...
... effect will be discussed later . A schematic of the deposition process for direct decoration is shown in figure 33 . 4.4.2.1 Particle Suspensions - Several particle suspensions were used successfully in direct decoration tests . These ...
Page 63
... Effect of Surface Conduction - The amount of phosphor deposited at cracks and pinholes can be markedly increased by exposing the sample to humid ambient for several seconds between charging and phosphor deposition . The moisture ...
... Effect of Surface Conduction - The amount of phosphor deposited at cracks and pinholes can be markedly increased by exposing the sample to humid ambient for several seconds between charging and phosphor deposition . The moisture ...
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Common terms and phrases
Acrylic aluminum etching aluminum-metallized applications Base Sheet Resistor BEC Model bias voltage Bias-Isolation Unit brightfield Bureau of Standards C-meter capacitance capacitor Capacitor over Collector carbon black circuit cm³ computed corona charging cracks defect detection demarcation etching demarcation-etched deposition dielectric screening length diode dopant density e-e scattering effect electron mobility EMITTER etch time factor etchant film Greek Cross impurity scattering mobility integrated circuits ionized impurity scattering liquid Lubrizol mask for quadrant materials metal microcracks microscope MOS Capacitor n-type silicon National Bureau neutral impurity scattering Number Oxide surface voltage p-n junctions partial pinholes passivation layer phonon phosphor phosphorus-doped silicon photomicrographs Photoresist Program quadrant are listed Resistor Greek Cross reverse decoration S(Cs sample Semiconductor Semiconductor Measurement Technology sensitivity Sheet Resistor Greek shown in figure silicon dioxide silicon nitride suspension technical techniques test pattern NBS-4 theoretical thermal thickness total donor density wafer
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