Semiconductor Measurement Technology: A 25-kV Bias-Isolation Unit for 1-MHz Capacitance and Conductance Measurements U.S. DEPARTMENT OF COMMERCE, Juanita M. Kreps, Secretary Dr. Sidney Harman, Under Secretary Jordan J. Baruch, Assistant Secretary for Science and Technology NATIONAL BUREAU OF STANDARDS, Ernest Ambler, Acting Director Library of Congress Cataloging in Publication Data A 25-kV bias-isolation unit for 1-MHz capacitance and conductance measurements. (Semiconductor measurement technology) (NBS special publication; 400-40) Supt. of Docs. no.: C13.10:400-40 1. Semiconductors-Testing. 2. Electric capacity. 3. Electric conductivity. 4. Electric meters. I. Title. II. Series. III. Series: United States. National Bureau of Standards. Special publication; 400-40. QC100.U57 no. 400-40 [TK7871.85] 602'.1s [621.3815'2'028] 77-608178 National Bureau of Standards Special Publication 400-40 CODEN: XNBSAV For sale by the Superintendent of Documents, U.S. Government Printing Office, Washington, D.C. 20402 Price $2 Stock No. 003-003-01832-5 3.3. Effect of the BIU on the Capacitance-Measurement 16 3.4. Effect of the BIU on the Conductance-Measurement 18 FIGURE CAPTIONS (Continued) PAGE Figure 3. Figure 2. Schematic drawing of connections to C/G-meter BIU 6 8 Plots of relative sensitivity factor S(C) and 14 17 19 S 21 Figure 10. Variation of capacitance and conductance with bias 23 Figure M17 Top and bottom support panels for R10 and R11 Figure M18 Drawing containing: 39 39 40 41 41 42 Figure M19 Physical layout of components in high-voltage Figure A3 Top view of Capacitance and Conductance Zero 47 Table 1. Electrical Parts List for C/G-Meter Bias-Isolation Table 2. List of Mechanical Parts (not commercially available). 5 25 |