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Semiconductor Measurement Technology:

A 25-kV Bias-Isolation Unit for

1-MHz Capacitance and Conductance Measurements

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U.S. DEPARTMENT OF COMMERCE, Juanita M. Kreps, Secretary

Dr. Sidney Harman, Under Secretary

Jordan J. Baruch, Assistant Secretary for Science and Technology

NATIONAL BUREAU OF STANDARDS, Ernest Ambler, Acting Director

Library of Congress Cataloging in Publication Data
Goodman, Alvin M.

A 25-kV bias-isolation unit for 1-MHz capacitance and conductance

measurements.

(Semiconductor measurement technology) (NBS special publication; 400-40)

Supt. of Docs. no.: C13.10:400-40

1. Semiconductors-Testing. 2. Electric capacity. 3. Electric conductivity. 4. Electric meters. I. Title. II. Series. III. Series: United States. National Bureau of Standards. Special publication; 400-40. QC100.U57 no. 400-40 [TK7871.85] 602'.1s [621.3815'2'028] 77-608178

National Bureau of Standards Special Publication 400-40
Nat. Bur. Stand. (U.S.), Spec. Publ. 400-40, 57 pages (Sept. 1977)

CODEN: XNBSAV

For sale by the Superintendent of Documents, U.S. Government Printing Office, Washington, D.C. 20402

Price $2 Stock No. 003-003-01832-5

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3.3.

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Effect of the BIU on the Capacitance-Measurement
Accuracy

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3.4.

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Effect of the BIU on the Conductance-Measurement
Accuracy

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FIGURE CAPTIONS (Continued)

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Figure 3.
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Figure 2. Schematic drawing of connections to C/G-meter BIU
Simplified equivalent circuit of C/G-meter and BIU

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Plots of relative sensitivity factor S(C) and
relative incremental sensitivity factor S' (C) vs C
with R = 100 and G/wC as a parameter

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Figure 10.

Variation of capacitance and conductance with bias
for an MIS sample fabricated from n-Si on sapphire

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Figure M17 Top and bottom support panels for R10 and R11

Figure M18 Drawing containing:

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Figure M19 Physical layout of components in high-voltage

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Figure A3

Top view of Capacitance and Conductance Zero
circuits with top cover and shield cover removed

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Table 1.

Electrical Parts List for C/G-Meter Bias-Isolation
Unit..

Table 2. List of Mechanical Parts (not commercially available).

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