Figure 30. METAL mask for quadrant 4 of test pattern NBS-4. Test structures located in this quadrant are listed in table 5. U. S. GOVERNMENT PRINTING OFFICE: 1978-261-238/56 Sponsoring Organization Name and Complete Address (Street, City, State, ZIP) 3. Recipient's Accession No. 5. Publication Date April 1978 6. Performing Organization Code 8. Performing Organ. Report No. 10. Project/Task/Work Unit No. 4256372 11. Contract/Grant No. ARPA Order No. 2397 13. Type of Report & Period Covered NBS Spec. Publ. 14. Sponsoring Agency Code SUPPLEMENTARY NOTES Library of Congress Catalog Card Number: 78-606024 ABSTRACT (A 200-word or less factual summary of most significant information. If document includes a significant bibliography or literature survey, mention it here.) Microelectronic test pattern NBS-4 is a revision of test pattern NBS-3 which was designed primarily for evaluation of the resistivity-dopant density relationship in silicon. Major changes include the addition of optional BASECONTACT and GATE masks and the incorporation of several new structures, some useful for the resistivity-dopant density work, and others, mostly sheet resistors, included for evaluation of new designs. The NBS-4 pattern contains 38 test structures such as planar four-probe resistors, sheet resistors, MOS capacitors, p-n junctions, bipolar and MOS transistors, Hall effect device, and process control structures. The overall pattern is a square 200 mil (5.08 mm) on a side and is divided into four quadrants which are separated by scribe lines. A detailed layout of each structure is presented including both a top view and a cross sectional view. Photomicrographs of each quadrant and the quadrants of the six masks used in the fabrication of the pattern are shown in an appendix. KEY WORDS (six to twelve entries; alphabetical order; capitalize only the first letter of the first key word unless a proper name; separated by semicolons) Dopant density; microelectronics; MOS capacitors; n-p-n transistor fabrication; p-n junctions; resistivity; semiconductor electronics; sheet resistors; silicon; test pattern; test structures. NBS TECHNICAL PUBLICATIONS PERIODICALS JOURNAL OF RESEARCH-The Journal of Research of the National Bureau of Standards reports NBS research and development in those disciplines of the physical and engineering sciences in which the Bureau is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Papers cover a broad range of subjects, with major emphasis on measurement methodology, and the basic technology underlying standardization. Also included from time to time are survey articles on topics closely related to the Bureau's technical and scientific programs. As a special service to subscribers each issue contains complete citations to all recent NBS publications in NBS and nonNBS media. Issued six times a year. Annual subscription: domestic $17.00; foreign $21.25. Single copy, $3.00 domestic; $3.75 foreign. Note: The Journal was formerly published in two sections: Section A "Physics and Chemistry" and Section B "Mathematical Sciences." DIMENSIONS/NBS This monthly magazine is published to inform scientists, engineers, businessmen, industry, teachers, students, and consumers of the latest advances in science and technology, with primary emphasis on the work at NBS. The magazine highlights and reviews such issues as energy research, fire protection, building technology, metric conversion, pollution abatement, health and safety, and consumer product performance. In addition, it reports the results of Bureau programs in measurement standards and techniques, properties of matter and materials, engineering standards and services, instrumentation, and automatic data processing. Annual subscription: Domestic, $12.50; Foreign $15.65. NONPERIODICALS Monographs Major contributions to the technical literature on various subjects related to the Bureau's scientific and technical activities. Handbooks-Recommended codes of engineering and industrial practice (including safety codes) developed in cooperation with interested industries, professional organizations, and regulatory bodies. Special Publications Include proceedings of conferences sponsored by NBS, NBS annual reports, and other special publications appropriate to this grouping such as wall charts, pocket cards, and bibliographies. Applied Mathematics Series—Mathematical tables, manuals, and studies of special interest to physicists, engineers, chemists, biologists, mathematicians, computer programmers, and others engaged in scientific and technical work. National Standard Reference Data Series-Provides quantitative data on the physical and chemical properties of materials, compiled from the world's literature and critically evaluated. Developed under a world-wide program coordinated by NBS. Program under authority of National Standard Data Act (Public Law 90-396). NOTE: At present the principal publication outlet for these data is the Journal of Physical and Chemical Reference Data (JPCRD) published quarterly for NBS by the American Chemical Society (ACS) and the American Institute of Physics (AIP). Subscriptions, reprints, and supplements available from ACS, 1155 Sixteenth St. N.W., Wash., D.C. 20056. Building Science Series-Disseminates technical information developed at the Bureau on building materials, components, systems, and whole structures. The series presents research results, test methods, and performance criteria related to the structural and environmental functions and the durability and safety characteristics of building elements and systems. Technical Notes Studies or reports which are complete in themselves but restrictive in their treatment of a subject. Analogous to monographs but not so comprehensive in scope or definitive in treatment of the subject area. Often serve as a vehicle for final reports of work performed at NBS under the sponsorship of other government agencies. Voluntary Product Standards-Developed under procedures published by the Department of Commerce in Part 10, Title 15, of the Code of Federal Regulations. The purpose of the standards is to establish nationally recognized requirements for products, and to provide all concerned interests with a basis for common understanding of the characteristics of the products. NBS administers this program as a supplement to the activities of the private sector standardizing organizations. Consumer Information Series-Practical information, based on NBS research and experience, covering areas of interest to the consumer. Easily understandable language and illustrations provide useful background knowledge for shopping in today's technological marketplace. Order above NBS publications from: Superintendent of Documents, Government Printing Office, Washington, D.C. 20402. Order following NBS publications—NBSIR's and FIPS from the National Technical Information Services, Springfield, Va. 22161. Federal Information Processing Standards Publications (FIPS PUB)-Publications in this series collectively constitute the Federal Information Processing Standards Register. Register serves as the official source of information in the Federal Government regarding standards issued by NBS pursuant to the Federal Property and Administrative Services Act of 1949 as amended, Public Law 89-306 (79 Stat. 1127), and as implemented by Executive Order 11717 (38 FR 12315, dated May 11, 1973) and Part 6 of Title 15 CFR (Code of Federal Regulations). NBS Interagency Reports (NBSIR)—A special series of interim or final reports on work performed by NBS for outside sponsors (both government and non-government). In general, initial distribution is handled by the sponsor; public distribution is by the National Technical Information Services (Springfield, Va. 22161) in paper copy or microfiche form. BIBLIOGRAPHIC SUBSCRIPTION SERVICES The following current-awareness and literature-survey bibliographies are issued periodically by the Bureau: Cryogenic Data Center Current Awareness Service. A literature survey issued biweekly. Annual subscription: Domestic, $25.00; Foreign, $30.00. Liquified Natural Gas. A literature survey issued quarterly. Annual subscription: $20.00. Superconducting Devices and Materials. A literature survey issued quarterly. Annual subscription: $30.00. Send subscription orders and remittances for the preceding bibliographic services to National Bureau of Standards, Cryogenic Data Center (275.02) Boulder, Colorado 80302. |